AMAT 1007-0016控制器模塊 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
AMAT 1007-0016 控制器模塊技術(shù)說明
1. 基本信息
型號(hào)：1007-0016
制造商：Applied Materials（應(yīng)用材料公司）
設(shè)備類型：半導(dǎo)體設(shè)備專用控制器
適用設(shè)備：主要應(yīng)用于200mm/300mm晶圓處理系統(tǒng)
2. 核心功能
設(shè)備主控制系統(tǒng)核心組件
負(fù)責(zé)設(shè)備邏輯控制和時(shí)序管理
與各子系統(tǒng)（傳輸/工藝/檢測(cè)）通信協(xié)調(diào)
3. 典型應(yīng)用
晶圓傳輸系統(tǒng)控制
工藝設(shè)備時(shí)序管理
設(shè)備安全聯(lián)鎖控制
4. 技術(shù)特點(diǎn)
采用實(shí)時(shí)操作系統(tǒng)（VxWorks）
支持SECS/GEM通信協(xié)議
內(nèi)置設(shè)備狀態(tài)監(jiān)控功能
雙冗余電源設(shè)計(jì)
5. 維護(hù)要點(diǎn)
日常檢查：
確認(rèn)狀態(tài)指示燈（LED）正常
檢查散熱風(fēng)扇運(yùn)轉(zhuǎn)情況
記錄控制器運(yùn)行日志
故障處理：
發(fā)生故障時(shí)優(yōu)先保存系統(tǒng)日志
檢查背板連接器接觸狀態(tài)
驗(yàn)證供電電源穩(wěn)定性（24VDC ±5%）
更換步驟：
停機(jī)后斷開所有連接線
記錄原有跳線設(shè)置
新模塊需加載備份配置文件
英文資料：
AMAT 1007-0016 Controller Module Technical Description
1. Basic information
Model: 1007-0016
Manufacturer: Applied Materials
Equipment type: Semiconductor equipment dedicated controller
Applicable equipment: mainly used in 200mm/300mm wafer processing systems
2. Core functions
Core components of the equipment main control system
Responsible for equipment logic control and timing management
Coordinate communication with various subsystems (transmission/process/detection)
3. Typical applications
Wafer transfer system control
Process equipment timing management
Equipment safety interlock control
4. Technical features
Adopting real-time operating system (VxWorks)
Support SECS/GEM communication protocol
Built in device status monitoring function
Dual redundant power supply design
5. Maintenance points
Daily inspection:
Confirm that the status indicator light (LED) is functioning properly
Check the operation of the cooling fan
Record the operation log of the controller
Fault handling:
Prioritize saving system logs in the event of a malfunction
Check the contact status of the backplane connector
Verify the stability of the power supply (24VDC ± 5%)
Replacement steps:
Disconnect all connecting wires after shutdown
Record the original jumper settings
New module needs to load backup configuration file
2.產(chǎn) 品 展 示
3.其他產(chǎn)品
4.其他英文產(chǎn)品
ASEA 57310256-BA circuit board
GESVDU-1D-8946 Input/Output Module
| 6DD1645-0AE0 | 6DD1681-0BF1 | ICS TRIPLEX TC-215-02 4M5 |
| 6DD1642-0BC0 | 6DD1681-0BD1 | ICS TRIPLEX TC-205-02 4M5 |
| 6DD1641-0AC0 | 6DD1681-0AJ2 | ICS TRIPLEX TC -201-02-8M5 |
| 6DD1640-0AH0 | 6DD1681-0AJ1 | ICS TRIPLEX TC-201-02-6M5 |
| 6DD1640-0AE0 | 6DD1681-0AJ0 | ICS TRIPLEX TC-201-02- 4M5 |
| 6DD1640-0AD0 | 6DD1681-0AH2 | ICS TRIPLEX T9802 |
| 6DD1640-0AC0 | 6DD1681-0AH1 | TRICONEX 7400206-100 |
| 6DD1611-0AG0 | 6DD1681-0AG2 | TRICONEX 9561-810 |
| 6DD1611-0AF0 | 6DD1681-0AF4 | TRICONEX 9563-810 |
本篇文章出自瑞昌明盛自動(dòng)化設(shè)備有限公司官網(wǎng)，轉(zhuǎn)載請(qǐng)附上此鏈接:http://www.jiangxidcs
